Lade Veranstaltungen

« All Events

  • Diese Veranstaltung hat bereits stattgefunden.

TEWI-Kolloquium: MEMS microfabrication-part I: Front-end

9. November 2018 um 14:30 - 15:30

Veranstaltungskategorie Vortrag |Foto: kasto/Fotolia.com

Veranstaltungsort
L4.1.02 (IKT-LAB)

Veranstalter
Fakultät für Technische Wissenschaften


Beschreibung

In this talk the basics of micro and nano fabrication techniques will be covered. We will discuss in particular how they are carried out in a typical clean room environment. We will learn what are the differences between the front-end and back-end in MEMs microfabrication. There will be a bunch of technical terms in thin film and thick film processing of MEMS, which will be explained briefly. We then follow up by describing the basics of the various fabrication steps such as thin film formation, lithography as well as etching. Some typical in-line and off-line characterization and testing techniques of thin films will also be introduced.

Vortragende(r)
Dr. Ali Roshanghias

Kontakt
Kerstin Smounig (kerstin.smounig [at] aau.at)

Details

Termine:
9. November 2018 um 14:30 - 15:30 Uhr
Veranstaltungskategorie:
zum Veranstaltungskalender