Fakultät für Technische Wissenschaften
In this talk the basics of micro and nano fabrication techniques will be covered. We will discuss in particular how they are carried out in a typical clean room environment. We will learn what are the differences between the front-end and back-end in MEMs microfabrication. There will be a bunch of technical terms in thin film and thick film processing of MEMS, which will be explained briefly. We then follow up by describing the basics of the various fabrication steps such as thin film formation, lithography as well as etching. Some typical in-line and off-line characterization and testing techniques of thin films will also be introduced.
Dr. Ali Roshanghias
Kerstin Smounig (kerstin.smounig [at] aau.at)